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A50.7011
Ion Sputtering Coater
 
A63.7081
Scanning Electron Microscope Pro FEG SEM
 
A63.7080
Scanning Electron Microscope Std FEG SEM
 
A63.7069
Scanning Electron Microscope Std SEM
 
A63.7062
Scanning Electron Microscope Eco SEM
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A63.7081 Scanning Electron Microscope Pro FEG SEM
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  Features:
 
  Detail Specification:
A63.7081 Pro FEG SEM
Resolution 1nm@30KV(SE);3nm@1KV(SE); 2.5nm@30KV(BSE)
Magnification 15x~800000x
Electron Gun Schottky Emission Electron Gun
Electron Beam Current 10pA~0.3μA
Accelerating Voatage 0~30KV
Vacuum System Ion Pump, Turbo Molecular Pump、Rotation Pump, Getter Pum
Detector High Vacuum Secondary Electron Detector (With Detector Protection) Semiconductor Four Segmentation Back Scattering Detector
Specimen Stage Five Axes Eucentric Motorized Stage
Travel Range X

0~150mm
Y

0~150mm
Z

0~60mm

R

360o

T

-5o~75o
Max Specimen Diameter

320mm
Modification

EBL;STM;AFM;Heating Stage;Cryo Stage;Tensile Stage;Micro-nano Manipulator;SEM+Coating Machine;SEM+Laser Etc.
Accessories

CCD,X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine Etc.

 

 

 
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