A63.7062 Eco Tungsten Filament SEM
|
Resolution |
4.5nm@30KV(SE); 6nm@30KV(BSE) |
Magnification |
Negative Magnification: 15x~250000x; Screen Magnification: 30x~500000x |
Electron Gun |
Tungsten Heated Cathode-Pre Centered Tungsten Filament Cartridge |
Accelerating Voltage |
0~30KV |
Lens System |
Three-level Electromagnetic Lens (Tapered Lens) |
Objective Aperture |
Molybdenum Aperture Adjustable Outside Vacuum System |
Specimen Stage |
Five Axes Stage |
Travel Range |
X(Auto) |
0~50mm |
Y(Auto) |
0~50mm |
Z(Manual) |
0~25mm |
R(Manual) |
360o |
T(Manual) |
-5o~90o |
Max Specimen Diameter |
150mm |
Detector |
High Vacuum Secondary Electron Detector (With Detector Protection) |
Modification |
Stage Upgrade;EBL;STM;AFM;Heating Stage;Cryo Stage;Tensile Stage;Micro-nano Manipulator;SEM+Coating Machine;SEM+Laser |
Accessories |
CCD,LaB6,X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine |
Vacuum System |
Turbo Molecular Pumps;Rotation Pump |
Electron Beam Current |
10pAt~0.1μA |
PC |
Customized Dell Work Station |